| 摘要 |
PURPOSE:To contrive the reduction of wiring inductances, by providing magnetic shield layers between a superconductive wiring and a superconductive ground plane. CONSTITUTION:The reduction of inductance L is realized by providing superconductive magnetic shields between a supercondutive wiring 5 and a ground plane 1. In a Josephson element, etc. having a multilayer wiring manufactured utilizing a fine pattern working technique, since a thin film 3' for other layer wiring in the same element can be utilized as a magnetic shield layer of the wiring 5 to be noticed, it has an advantage also in a processing meaning. Besides, fine adjustment for inductance values is allowed by providing a magnetic shield by this invention on a part of the wiring. |
