| 摘要 |
PURPOSE:To prevent the generation of positional deviation on transfer patterns by a method wherein the shifting and the positioning of a shifting stand is performed highly precisely at a high speed, and also said shifting stand is fixed at the proper position. CONSTITUTION:The compressed air coming from an air feeding pipe 6 is fed to the gap located between a surface plate 1, a guide block 2 and a pad 7 from blowoff holes 5a and 5b, a static pressure gap bearing is formed, a shifting stand 3 is slightly floated up from the surface plate 1 and shifted in the right-angled direction to the paper surface. When vacuum is fed from an exhaust pipe 8 after the shifting stand 3 has been shifted, an attracting member 10 is lowered resisting the spring force of a plate spring 11, and the lower surface 10b is attacted to the upper surface 10a. The plate spring 11 can be elastically deformed in the direction of the plate thickness, but as its rigidity is larger in the right-angled direction to the plate thickness, the shifting stand 3 is not shifted when the attraction member is lowered, the evacuation to an exhaust pipe 8 is to be stopped in order to step-move the shifting stand 3. The amount of floating of the attraction member 10 is regulated by a controlling member 14. |
