发明名称 SHOCK ABSORBER FOR SEMICONDUCTOR DEVICE MANUFACTURING JIG
摘要 PURPOSE:To prevent the edge of semiconductor plate from pitching due to shocking hit at a jig by a method wherein the multiple strings, cords or ribbons and the like are stretched between two points in the direction passing through the main surface of semiconductor plate fixed to a jig as a shock absorber. CONSTITUTION:The two pieces 16, 17 of a shock absorber 11 are provided on the bottom surface 8 of a jig 1. The strings 20 of the shock absorber 11 fixed to the edge of the screw 22 is fixed to a string stopper 13 through the hole 24 of a guide 15, the slot 19 of the piece 17, the slot 18 of the piece 16 and the hole 14 of said stopper 13. The bottom frame 6B of the jig 1 is below the stretched strings 20. Therefore, when the semiconductor plate 30 is fixed to the jig 1 approximately perpendicular to said jig 1 as shown by the arrow mark, said plate 30 never directly hit the bottom frames 6A, 6B as said plate 30 is supported by said strings 20. Consequently the semiconductor 30 is neither subject to pitching nor stained by the shock absorber 11.
申请公布号 JPS5843536(A) 申请公布日期 1983.03.14
申请号 JP19810141046 申请日期 1981.09.09
申请人 HITACHI SEISAKUSHO KK 发明人 TSURUOKA MASAO;KAJIYAMA HITOSHI
分类号 H01L21/673;(IPC1-7):01L21/68 主分类号 H01L21/673
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