| 摘要 |
PURPOSE:To obtain an oxygen sensor element which is free of the breaking of a heating body and has less variance in resistance value by providing the heating body on the surface side of a specific structure base body, and then sticking the substrate side of a prefabricated enzyme concentration detection part on the heating body directly or with a thin-film insulating layer interposed. CONSTITUTION:For a specific structure body 25, conductor paste is printed on one surface side of a structure substrate 21 to form a heating body 22, and Pt wires 26a, 26b, and 26c are arranged on both end parts and an intermediae part of the heating body 22. In a ceramic green sheet, on the other hand, through holes 27a-27c which correspond to the Pt wires 26a-26c are perforated, and a frame-shaped structure substrate 23 privided with electrode lead parts 32 and 34 is laminated on the substrate 21 for contact bonding under heating. This is baked to obtain the structure base body 25. Then, the 1st plural electrodes 12 are formed on a large substrate 11, and oxygen solid- state electrolytes 13 and the 2nd electrodes 14 are formed successively on the electrodes 12; and the substrate is cut into individual oxygen concentration detection parts 15, which are inserted into the frame of the structure 25 and then fixed by using a heat- resisting, insulating adhesive 29. Then, a protective layer 30 is provided over the entire surface of the element. Thus, the breaking of the heating body 22, etc., is prevented to obtain a long-life sensor. |
