,申请号JP19780101124U-传众专利搜索

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发明名称
摘要
申请公布号	JPS5812827(Y2)	申请公布日期	1983.03.11
申请号	JP19780101124U	申请日期	1978.07.21
申请人		发明人
分类号	C23C16/44;B01J19/00;C23C16/448;H01L21/205;H01L21/36;(IPC1-7):C23C11/00	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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