摘要 |
PURPOSE:To improve the reproduction output characteristics and adhesive strength by moving a substrate so that the incident angle of a flow of vapor of a magnetic metallic material is continuously changed from a large incident angle to a small incident angle and by introducing an oxidizing gas into the small incident angle part. CONSTITUTION:A flow of vapor of a ferromagnetic body is diagonally vacuum- deposited on a support 2 transferred along a cylindrical cooling can 1 in the direction of an arrow 3 from an evaporating source 4 through a mask 5 so that the incident angle is continuously changed from a large incident angle thetamax to a small incident angle thetamin, and a gas introducing pipe 6 is installed at the small incident angle part to introduce an oxidizing gas such as gaseous oxygen. |