发明名称 MANUFACTURE OF INTEGRATED CIRCUITS BY MASTER SLICE METHODS
摘要 In the manufacture of an integrated circuit by a master slice method, a feeder line (65) for supplying electric power to a unit-cell array (1) is gradually narrowed in width from each end towards the middle (8) of the array. In this way, the supply of sufficient voltage for the unit-cells can be maintained at the middle of the IC whilst the area availabe for interconnections is increased.
申请公布号 IE822222(L) 申请公布日期 1983.03.10
申请号 IE19820002222 申请日期 1982.09.10
申请人 FUJITSU LTD 发明人
分类号 H01L21/822;H01L21/3205;H01L21/82;H01L23/52;H01L23/528;H01L27/04;H01L27/118;(IPC1-7):H01L27/02 主分类号 H01L21/822
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