| 摘要 |
PURPOSE:To generate a long life and stable ion beam by coating a part of the surface of at least any of a filament, reservoir section, and needle-type member with a liquid metal and a substance with a bad affinity with respect to a liquid metal ion source. CONSTITUTION:Ceramic 11 is deposited thin on the surface on which a spot- welded filament 6 is adjacent to a reservoir 1. Since the said ceramic has a bad affinity with a liquid metal such as gallium or the like, the liquid metal that moves on the surface of the reservoir 1 by thermal diffusion is prevented by the said ceramic 11 from being diffused toward the direction of low temperature area on which filament 6 is adjacent to a support body 9. As a result, a lump of the liquid metal is not gnerated in this filament 6. Thus the gallium 3 within the reservoir 1 can be heated up to desired temperatures and can be moved to the tip of a needle-type member 4 stably. Besides, since the liquid metal is not diffused on the surface of the filament 6 and a lump of the liquid metal is not generated, a long life ion source can be obtained. |
