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发明名称
LITHOGRAPHIC PHOTORESIST COMPOSITION
摘要
申请公布号
EP0020870(B1)
申请公布日期
1983.03.09
申请号
EP19800101463
申请日期
1980.03.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BALANSON, RICHARD DAVID;CLECAK, NICHOLAS JEFFRIES;GRANT, BARBARA DIANNE;OUANO, AUGUSTUS CENIZA
分类号
G03C1/72;G03F7/016;G03F7/038;G03F7/039;(IPC1-7):03F7/08
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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