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发明名称
ETCHING METHOD
摘要
申请公布号
JPS5839777(A)
申请公布日期
1983.03.08
申请号
JP19810137180
申请日期
1981.08.31
申请人
SANYO DENKI KK
发明人
RAI YASUKI;YOSHINO HIROTETSU
分类号
C23F4/00;C23F1/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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