| 摘要 |
PURPOSE:To improve the recongnition coefficient for electrode shape by a method wherein, in a video digital conversion circuit, the video signal of a semiconductor chip is compared with the electrode, luminace, and voltage of the semiconductor chip and the resultant value is converted to a video digital signal. CONSTITUTION:The level of luminance on the circumferential part of electrodes 101 and 102 of the semiconductor chip 100 is measured by a photoelectric conversion device 6, and the voltage obtained is memorized in an electrode luminance voltage memory storage 7. The measured semiconductor chip 100 is photographed by a video camera 1, a video signal is outputted to a video digital conversion circuit 4 through a video amplifying circuit 2, the level of the video signal is compared with the electrode, luminance and voltage, changed to a video digital signal, and outputted to an external machine as a recognition signal. In the digital conversion circuit 4, as a video signal is converted to a digital signal, a video signal exactly in the shape of electrodes 101 and 102 can be obtained even when there is a minor fluctuation in the luminance level of the electrodes 101 and 102 at respective position, thereby enabling to improve the recognition coefficient for the shape of the electrodes 101 and 102. |
