| 摘要 |
PURPOSE:To ensure the detection of the contact state of the probe and an object to be measured by a simple structure, by arranging a means for suspending and determining the base end part of a spindle so that the spindle can be displaced upward. CONSTITUTION:The touching signal probe P is moved with the movement of a probe moving body and the like and the tip of the probe 1 is contacted with the object to be measured. For example, when the tip is contacted with the negative direction of an X axis, the spindle 3 is displaced in the plus direction of the X axis against a weak spring 4A, electric contacts 6A and 6B become a noncontact state, and the contact of the object to be measured and the probe 1 are detected by a detecting circuit. When the probe is returned to the positive direction of the X axis after the contact, the base end part 3A of the spindle 3 is quickly returned to the neutral position since the flat surface of said base part is energized by a compressing spring 25. Therefore, the repeating detections can be performed quickly and accurately by the simple structure. |
