| 摘要 |
PURPOSE:To lower the surface temperature of a graphite disc by water cooling the interior of an alumina post in a hollow pipe structure. CONSTITUTION:One ends of a water supply and exhaust post pipe 13 and a connecting insulation post pipe 6 are sealed via frit glass through a connecting pipe 14, and the other ends are sealed via connecting pipe 15, thereby sealing in vacuum. Cooling water fed from 17a transmits heat at the temperature of a graphite disc 7 through a connecting insulation post pipe 16, and is drained from 17b, thereby lowering the surface temperature. Accordingly, it can reduce the graphite powder and the production of a sputter film, thereby obtaining an ion laser tube having long lifetime and high reliability. |
