| 摘要 |
PURPOSE:To achieve the better protection of an oxygen concentration detecting section with the reduction in the separation of a protective layer by providing the layer covering it with such a shape of the end thereof that the thickness thereof decreases gradually on the surface of a substrate thereof. CONSTITUTION:An oxygen sensor has an intermediate layer 5 on a substrate 1. A reference electrode 6, a solid electrolytic layer 7, a measuring electrode 8 and a second measuring electrode 9 are stacked sequentially thereon 5 to form an oxygen detecting section. In this case, a protective layer 20 is so formed that the thickness thereof decreases gradually at the end thereof on the substrate 1 thereof to hold the gradient within 45 deg.. This can check possible separation of the protective layer at said end thereof so effectively as to prevent deterioration in characteristics of the oxygen concentration detecting section due to such a separation. |
