| 摘要 |
PURPOSE:To obtain a thin film magnetic head assembly having high track density, by setting plural thin film magnetic heads and current terminals on the same substrate and having a connection via a thin film transformer for the array of current terminals corresponding to the magnetic heads, respectively. CONSTITUTION:The 1st ''Permalloy '' head core elements 2a and 2b and then the 1st transformer core elements 3a and 3b forming a magnetic core of a thin film transformer are formed on a ''Fotoceram '' substrate 1 by a mask vapor deposition process. An SiO2 film is stacked on the substrate 1 by a sputtering process, and U-shaped Al conductors 4a and 4b are formed with a partial overlap on the core elements 2a and 2b. At the same time, the adverse U-shaped Al conductor 5a and 5b are formed with a partial overlap on the core elements 3a and 3b. While spiral Al conductors 6a and 6b having current terminals 9a and 9b are provided to form a thin film head of the 1st layer. In such a way, plural thin film magnetic heads are arrayed with high density with no limitation given to the space for the array of current elements. |
