| 摘要 |
PURPOSE:To enhance the cooling capability of the electrode itself and to eliminate the cooling process with gas by mounting the fin for cooling to the electrode terminal. CONSTITUTION:This laser generator is of the 3-axis orthogonally crossing type, where the laser beam axis (indicated as X), gas flowing direction (arrow mark Y) and discharge direction (arrow mark Z) are mutually crossing orthogonally. The discharge exciter part 2 of laser generater on which the pin electrode 1 is mounted allows boring of hole 10a on the insulated plated 10 so as to bury the pin electrode 1 thereto and the insulation oil flowing path 11 for cooling is formed at the upper surface thereof. The pin electrode 1 is heated by the thermal conduction or irradiation from the negative grow part 20 or by ion collision, but it does not allow temperature rise because the heat is released to the insulation oil 15 through the cooling fin 7. The insulation oil 15 is circulated by the pump. Therefore, cooling by gas is no longer necessary. |
