| 摘要 |
PURPOSE:To quickly cool a heating member with high efficiency, by watertightly covering the heating member with a cooling mechanism for opposingly jetting a cooling medium to the heating member, and chamber having an overflow path for overflowing the cooling medium. CONSTITUTION:A heating member W placed on a cooling bed 1 is covered watertightly with cooling mechanisms 5, 52 for opposingly jetting a cooling fluid to the heating member W, and a chamber 3 of prescribed capacity, having an overflow path 6 for overflowing a cooling medium jetted from the cooling mechanisms 5, 52. When the cooling medium is jetted to the heating member W from the cooling mechanisms 5, 52, the cooling medium films the chamber 3, and is discharged from the overflow path 6. Accordingly, the heating member W is quickly cooled effectively by the cooling medium jetted from the cooling mechanisms 5, 52, and the cooling medium which has filled the chamber 3. |
