MOLECULAR BEAM EPITAXIAL GROWTH APPARATUS

摘要

PURPOSE:To keep clean each chamber by providing the transfer mechanism to the space coupled by the gate valve which joins the molecular beam cell auxiliary processing chamber and the crystal growth chamber. CONSTITUTION:The molecular beam cell auxiliary chamber 3 is coupled with the crystal growth chamber 2 by the gate valve 5 and is provided with the cell transfer mechanism 16 which alternatively transfers the cell 13 to the crystal growth chamber 2 and auxiliary chamber 3 via the gate valve 5. Thereby, the clean evaporation material can be supplied without exposing the crystal growth chamber to the atmospheric condition and the vacuum atmosphere in the growth chamber can always be kept clean. Accordingly, the high purity epitaxial growth layer which is resistive to the contaminating elements can be obtained. Gas separation and purification of cell carried out simultaneously with epitaxial growth realizes curtailment of water manufacturing period by the epitaxial growth.