METHOD OF DETERMINING EFFECTIVE CONCENTRATION OF IMPURITIES IN SEMICONDUCTOR MATERIALS HETEROJUNCTIONS,申请号SU19813301800-传众专利搜索

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发明名称	METHOD OF DETERMINING EFFECTIVE CONCENTRATION OF IMPURITIES IN SEMICONDUCTOR MATERIALS HETEROJUNCTIONS
摘要
申请公布号	SU1001237(A1)	申请公布日期	1983.02.28
申请号	SU19813301800	申请日期	1981.06.11
申请人	INST RADIOTEKH ELEKTRON	发明人	POLYAKOV VASILIJ I,SU;PEROV POLIEVKT I,SU;PETROV VIKTOR A,SU
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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