发明名称 BONDING METHOD AND DEVICE FOR PELLET
摘要 PURPOSE:To perform a satisfactory wet pellet bonding by rolling a collet of a pellet bonder in a direction perpendicular to a scrubbing simultaneously upon scrubbing, thereby producing gold silicon eutectic crystal on the overall back surface of the pellet. CONSTITUTION:A lever 27 is rocked upon forward and backward movements of a slide base 13, and a rolling lever 26 is rocked through a link 28. Thus, a supporting shaft 16 is rotatably reciprocated, thereby rockably turning. A bonding arm 17 rolls upward and downward as well as rightward and leftward, thereby performing scrubbing operation. As a consequence, a collet 21 achieves the scrubbing while applying pressure to roll the pellet P and intimately rubs the entire back surface of the pellet P on the bottom of the base B. In this manner, silicon eutectic crystal is produced on the overall back surface of the pellet.
申请公布号 JPS5833846(A) 申请公布日期 1983.02.28
申请号 JP19810131532 申请日期 1981.08.24
申请人 HITACHI SEISAKUSHO KK 发明人 OZAWA MASAKAZU;SUGIMOTO TATSUO
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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