| 摘要 |
PURPOSE:To position a specific measurement position accurately for measurement by comparing the width value of a body to be measured obtained by scanning with a width value right before scanning, and determining a measured value from the extent of the difference in width value between them. CONSTITUTION:An output signal from a signal detection part 2 which detects a signal by scanning a moving body 1 to be measured is processed, and on every scanning operation, the width value of the body 1 to be measured and a measured value at its specific part position are stored in a storage circuit 22. Then, the width value obtained by one scanning operation is compared with a width value obtained by last scanning by a comparator 23; when the result of the comparison, i.e. the difference in width value is less than a prescribed value, the sample-held value of the current scanning is regarded as a measured value and when not, the sample-held value of the last scanning is employed, thereby displaying the obtained measured value on a CRT29 through a control circuit 24. |
