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发明名称
摘要
申请公布号
JPS5810856(B2)
申请公布日期
1983.02.28
申请号
JP19750034498
申请日期
1975.03.24
申请人
NIPPON TELEGRAPH & TELEPHONE
发明人
SUGATA TAKAYUKI
分类号
H01L21/28;H01L21/301;H01L21/306;H01L21/3213;H01L33/08;H01L33/30;H01L33/34;H01L33/36;H01L47/00;H01L47/02
主分类号
H01L21/28
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代理人
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