| 摘要 |
<p>PURPOSE:To raise a beta value of a nonlinear element, and to elevate the characteristics, by constituting said nonlinear element formed on each picture element of a liquid crystal panel by laminating in order tantalum-tantalum pentoxide- manganese dioxide-tantalum pentoxide-tantalum. CONSTITUTION:A tantalum layer 42 is formed on a glass substrate 41, and patterning by photolithography is executed. Thereafter a tantalum pentoxide layer 43 is formed by means of anodic oxidation. A manganese dioxide layer 44 is then formed, a thin film 45 of tantalum pentoxide is formed, and a tantalum metallic layer 46 is patterned and is connected to an ''NESA '' electrode layer 47. In this way, when a manganese dioxide layer is added, a beta value of a nonlinear element takes a very large value and becomes >=9.</p> |
