| 摘要 |
PURPOSE:To make it possible to carry out laser printing inexpensively in good efficiency, by constitution wherein plural sheet articles to be processed are accomodated in a carrier and this carrier is placed on and conveyed by a conveyor mechanism to print evey one sheet successively while said sheet articles to be processed are accomodated in the carrier. CONSTITUTION:Plural wafers 6 which are articles to be processed are accomodated in a carrier 5 at equal intervals and this carrier is placed on a carrier conveyor mechanism 4. In this condition, the conveyor mechanism 4 is operated to move the carrier 5 and stopped at a time when the first wafer 6 accomodated in the carrier 5 reaches the focus position of laser beams. Subsequently, laser beams are issued from a laser oscillator apparatus 2 and condensed to the surface of the wafer 6 through a scanning optical part 3 and a condensing lens 7 to carry out printing. After printing is completed, the conveyor mechanism 4 is again operated to move the carrier and the carrier 5 is stopped at the position of the next wafer 6 to successively carry out the printing. |
