| 摘要 |
PURPOSE:To make it possible to measure the sizes of the particles in the region wherein the sizes thereof are relatively small, by using a specified light receiving system and a measuring system of scattered light distribution. CONSTITUTION:A beam 12 which is formed by a laser 1 and a beam forming sytem 2 is irradiated on a sample 3, and its scattered light is detected by the light receiving system comprising a light receiving lens 9, a pin hole 10, and photodetector 6. After the detected signal has been amplified, the distribution of the sizes of the particles is obtained by a signal processing system 8. In this case, the pin hole 10 is placed at the focal point of the lens 9 and the detector 6 is placed at the rear of the pin hole 10. Thus only the scattered light which is in parallel with the optical axis of the lens 9 is inputted to the detector 6. Then said light receiving system is scanned by a driving device 11, and the scattering distribution is measured. As a result, the sizes of the small particles can be measured. |
