| 摘要 |
PURPOSE:To obtain an image with a good quality without causing any vacuum trouble, and rapidly carry out the change-over of a transmitted image, which is to be observed, by turning on and off an exciting power source, and providing an alignment electron-ray deflecting means on the incidence side and the discharge side of an analyzer. CONSTITUTION:In observing a usual transmitted electron-microscope image, a change-over switch 36 is connected to the off side, a switch 37 is turned off, and a slit 40 is removed. Electron rays discharged from an electron gun 1, after passing through a sample 4, an objective lens 5, a lens 6 and an intermediate lens 8, is imaged upon a fluorescent plate 42 by means of a projection lens 41. In obtaining a transmitted image of a sample by means of an omega type electorn- ray analyzer 7, the change-over switch 36 is switched to the connected state. In addition, a slit 40 is located, and the switch 37 is left to be in a off state. Electron rays discharged from the electron gun 1 are imaged upon the plate 42 through the sample 4, the lens 5, the analyzer 7, the slit 40, the lens 8 and the lens 41. Thus, the change-overs can be carried out rapidly by switching the switches 36 and 37 without causing any trouble on the vacume seal, and without mechanically moving the analyzer 7. |
