| 摘要 |
PURPOSE:To largely shorten the moving time of semiconductor pellets arranged on a flexible sheet by providing an optical sensor which detects the presence or absence of the pellet ahead in the moving direction of the visual field of a detector of the pellet, thereby moving the table at a continuously high speed up to the detection of the next pellet. CONSTITUTION:When light guides 11 are mounted at the prescribed interval L at both sides of a camera 4, are moved at a continuously high speed unitl a preceding sensor 10 detects the presence of the pellet, are moved at a distance L+(displacement DELTAL) after the detection of the pellet and are stopped, the pellet can be set into the visual field of a camera without problems of the size and arranging interval. Since the pellet presence or absence information is loaded by the optical sensor preceding to the camera in a real time, no loss exists in the movement of the table when the pellet is not existed but the position of the pellet can be readily and effectively detected at a high speed. |
