| 摘要 |
<p>PURPOSE:To obtain a thermal head having excellent heat response characteristic by forming a conductor layer serving as a heat transmission layer on an alumina base plate provided with graze and also an oxide film serving as a heat-shock resistant layer on the surface of the conductor layer. CONSTITUTION:Ta, Ti, Hf, Zr, etc., are adhered onto an alumina base plate 21 provided with a graze 1 by sputtering, vapor deposition, etc., and then an oxide film 3 is formed on the surface of the thin film of Ta, etc., by a heat oxidation or anodic oxidation method, etc. The oxide film 3 plays a role of a heat shock- resistant layer to protect the heat storage layer when patterning and etching a heating material. A metal layer 6 staying without being oxidized below the oxide film 3 has a function as a heat transmission layer by which the cooling effect of the heating material is raised and also the distribution of heat is equalized. On the oxide film 3, a heating resistor layer 4, an electrode conductor layer, and a wear-resistant layer 5 are formed.</p> |
