| 摘要 |
PURPOSE:To make it possible to compare and evaluate even the samples having different quantities and surface compositions quantitatively, in the evaluation of the surface roughness, by irradiating direct light from a light source, and obtaining a reflectance from the ratio between the intensity of the irradiated light and the intensity of the light reflected by the sameple. CONSTITUTION:The light from the light source 1 is made to be monochromatic light by a grating spectroscope 2 and divided into luminous fluxes 10 a and 10b by a rotary mirror 3. The luminous flux 10a is inputted into a detector 6 as reference light through reflecting mirrors 5a and 5b. The luminous flux 10b is irradiated on the sample 8 through a semi-transparent mirror 12 and an objective line 13, and its reflected light is inputted into a detector. The reflectivity is computed from the ratio between the intensity of said reflected light and the intensity of said reference light by a computing and displaying means 7. Then the surface roughness is displayed. When the two objective lenses having the different magnification are used and the ratio between the reflectivities obtained by the measurement through both lenses is obtained, the absorbing effects are offset, and the surface roughness can be evaluated only by the scattering light. |
