| 摘要 |
PURPOSE:To form the micropin lines accurately and readily, by machining specified positions of a metal sheet made of a micropin material, simultaneously manufacturing many micropins, thereby providing the interval between the pin lines and the interval between the pins in the direction of the lines based on the accuracy of a mask for machining the pins. CONSTITUTION:Many micropins 2, which are the parts for mounting superconducting element, are manufactured by aligning them on a silicon foot 1 with a specified interval being provided. At this time, the metal sheet 203 made of the micropin material is prepared. Position aligning through holes 204 whose locations are determined by the relative positions of the pins 2 are perforated in said material 203. At the position corresponding to a wiring pattern 3 on one surface of said sheet 203, a disk shaped protruded part, which is to become a pin seat 201 by dischage machining, is formed. Bonding solder 4 is evaporated on the bottom surface of said seat 201. Then the hole 204 and a position aligning evaporating pattern 301 are overlapped, and the seat 201 is placed on the part of each wiring pattern 3 corresponding to the pin seat. Then they are compressed and heated, and the sheet 203 and the silicon foot 1 are bonded accurately. |
