| 摘要 |
PURPOSE:To produce a metallic photomask without having a printing process and to avoid the attachment of foreign matters, etc. during the handling, by deleting a gelatin film after baking the photomask and then deleting a silver educing part after the attachment of a metallic film. CONSTITUTION:An emulsion photomask containing a pattern part 2 where the silver educed onto a glass substrate 1 and a gelatin film 3 is baked to harden the emulsion layers 2 and 3. Then a part 3' exclusively consisting of the film 3 is removed. A metallic film 4 is attached on the emulsion mask by a sputtering or vapor deposition process, and the part 2''' where the silver is educed is deleted along with the film 4 stuck onto the part 2'''. Thus a metallic photomask is obtained without interposing a printing process, and the attachment of foreign matters can be avoided during the handling or printing. At the same time, the use of a valuable metallic photomask substrate is eliminated. |
