| 摘要 |
PURPOSE:To attain the adjustment of an error caused by the exchange of a super-high pressure mercury lamp which is used as a light source part without using a lamp house and a shift mechanism, by providing a stage having a fine adjustment mechanism. CONSTITUTION:An exposure device comprises a panel stage 12 at the upper surface, an internal compensating lens 13, a filter 14, a light source part 16 provided into a lamp house 15, and a shift mechanism 17 which sets the part 16 via the house 15 at the deflecting center of the electron beams that actuate the fluorescent substance layers of red, yellow and blue respectively. A stage 19 contains a fine adjustment mechanism 18 that can compensate the house 15 and the mechanism 17 within a plane which is decided by the axes X and Y which are orthogonal to each other on the stage 12. Thus a panel stopper 121 provided on the stage 12 is fixed to perform the positioning of both the house 15 and the mechanism 17. |
