| 摘要 |
PURPOSE:To enable the deterioration of an analyzing tube caused by sputtering to be detected, and facilitate the exchange of a wave guide liner by installing the said wave guide liner, which can be moved in meandering form, on the inner wall of the analyzing tube, and attaching beam detecting wires to the said wave guide liner. CONSTITUTION:A wave guide liner (1-G), which is assembled by linking a number of crescent-moon-like columns (1-a) with coupling arms (1-b) and can be moved in meandering form, is installed on the inner wall of an analyzing tube 7 of a mass spectrograph used for an ion-implantation device. In addition, holes are provided on the side walls of the columns (1-a), and detection wires (1-F) are wired in the above holes. As a result, the wave guide liner (1-G) can be fitted on the inner wall of the tube 7 only by pressing the liner (1-G) upon the above inner wall, and the exchanger or the like of the liner (1-G) is facilitated. Besides, since the deterioration of the liner (1-G) can be observed by observing the breakage of the wire (1-F), the deterioration and the stain of the tube 7 caused by sputtering can be suppressed to an appropriate degree. |
