| 摘要 |
PURPOSE:To make another informational picture to be displayed in a specific area of a picture by selecting three kinds of informations from among those obtained by scanning electron rays over a sample, using two of them as luminance signals for a cathode-ray tube through a selecting circuit, and using one of them as a control signal for the selecting circuit. CONSTITUTION:Electron rays, after being restricted to be fine, are two-dimensionally scanned over a sample 4. Detectors 9a-9d detecting, respectively, secondary electrons, reflected electrons, X rays and transmitted electrons are installed around a sample 4. In addition, a signal (a) of the secondary electrons and a signal (b) of the X-rays are used as the input to a selecting circuit 11, and another signal (c) of the X-rays is introduced into a cathode-ray tube 7 as a change-over controlling signal of the circuit 11. Therefore, when the X-ray signal is set to a certain element, the area in which the element exists is displayed as a picture by the X-ray signal, and the other area is displayed as a secondary electron picture. As a result, X-ray pictures can be displayed within the secondary-electron picture, and a simultaneous comparison between the secondary-electron picture and the X-ray pictures can be carried out. |
