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发明名称
VERFAHREN ZUR ERZEUGUNG VON HOCHVAKUUM ZUR DURCHFUEHRUNG VON BESCHICHTUNGSPROZESSEN.
摘要
申请公布号
CH634606(A5)
申请公布日期
1983.02.15
申请号
CH19770012780
申请日期
1977.10.20
申请人
BALZERS AG
发明人
DR. THADDAEUS KRAUS
分类号
B01J3/00;C23C14/56;(IPC1-7):C23C13/00
主分类号
B01J3/00
代理机构
代理人
主权项
地址
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