发明名称 Method of vapor deposition
摘要 Disclosed is a method of forming a deposit, such as silicon, by the reaction of a reactant, such as lithium, with a gas containing the element or compound to be deposited, such as silicon tetrachloride. One reactant diffuses through the growing scale on a heated inert substrate to react with the gas on the other side of the scale and lead to further scale growth.
申请公布号 US4374163(A) 申请公布日期 1983.02.15
申请号 US19810307139 申请日期 1981.09.29
申请人 WESTINGHOUSE ELECTRIC CORP. 发明人 ISENBERG, ARNOLD O.
分类号 H01L31/04;C23C16/01;C23C16/08;C23C16/24;H01L31/18;(IPC1-7):C23C11/00 主分类号 H01L31/04
代理机构 代理人
主权项
地址