| 摘要 |
PURPOSE:To know the area of a sample which is analyzed with an ion beam by scanning an electron beam, which has a smaller diameter than an ion beam, over a sample upon which the ion beam is irradiated, and displaying the image of thus produced secondary electron beam. CONSTITUTION:An ion beam 5 sent from an ion source 1, after being restricted to be very fine, is irradiated upon a sample 4, and thus produced secondary ions are analyzed by a proper means. At this point, an electron beam 9 sent from an electron gun 6 is restricted to be much more fine than the ion beam 5, and is scanned over the sample 4 by means of a polarizing lens 8. Next, a secondary electron beam 11 given by the above scanning is detected with a secondary- electron detector 10, and sent to a cathode-ray tube 13 so as to display a secondary-electron image of the sample 4. As a result, since a part to which ions are applied is displayed within the image of the secondary electron beam 11, the analyzed area can be known from the diameter of the ion beam image. Besides, the position of the analyzed area can be known from the position of the ion beam image. |
