发明名称 |
Illuminator for supplying a divergent illuminating beam from a predetermined area of a plane |
摘要 |
An illuminator for supplying a divergent illuminating beam from an area of predetermined energy distribution and dimensions comprising a coherent source whose image is formed in a plane by imaging means incorporating electrically controlled optical scanning means making it possible to displace the image in the said area in accordance with a predetermined law.
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申请公布号 |
US4373774(A) |
申请公布日期 |
1983.02.15 |
申请号 |
US19800142473 |
申请日期 |
1980.04.21 |
申请人 |
THOMSON-CSF |
发明人 |
DUBROEUCQ, GEORGES;LACOMBAT, MICHEL;BREVIGNON, MICHELE |
分类号 |
H01L21/30;G02B19/00;G03F7/20;H01L21/027;(IPC1-7):G02B27/17;G02B27/48 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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