| 摘要 |
PURPOSE:To specify the same defect even in case when a sample is vibrating, by standardizing a measured time width and a standard signal width. CONSTITUTION:Reflected rays from a sample by scanning light are photodetected by a photoelectric element 21, are processed by a rise detector 24, a signal width detector 26 and a defective position detector 27, and a signal width T and a time width DELTAT to a defective position are detected. In accordance with these width T and DELTAT, time width DELTAT0 corresponding to a standard signal width T0 is operated and calculated in a defect generated position standardizing circuit 28, and even in case when the sample vibrates and the width T and DELTAT are varied to T', DELTAT', etc., the time width DELTAT0 is specified. |
