发明名称 TESTING DEVICE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To execute a test exactly and efficiently, by mechanizing a clamping test, and giving a constant pressure. CONSTITUTION:On the top part of a supporting column 12 provided on the center part of a base 11, levers 13, 13' moving as one body are supported. One end of each lever 13, 13' comes into contact with a piston rod 14a of an air cylinder 14, and the other end comes into contact with rods 16, 16' for pressing a semiconductor device 2 installed to a semiconductor device installing part 15. Also, as for the cylinder, high-pressure air is further made to branch by a conduit 17, and it is operated by solenoid valves 18a, 18' and air pressure controllers 19a, 19a' which have been inserted in series into said valves, respectively.
申请公布号 JPS5822937(A) 申请公布日期 1983.02.10
申请号 JP19810121381 申请日期 1981.08.04
申请人 TOKYO SHIBAURA DENKI KK 发明人 KAMIYA KINYA;OTAKA HIDEYUKI;MIKI DAIZOU;TAMAYA ISAMU
分类号 G01N3/20;(IPC1-7):01N3/20 主分类号 G01N3/20
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