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经营范围
发明名称
DETECTING DEFECTS IN PATTERNS
摘要
申请公布号
GB2044925(B)
申请公布日期
1983.02.09
申请号
GB19800008672
申请日期
1980.03.14
申请人
RCA CORP
发明人
分类号
G01N21/956;(IPC1-7):G01N21/88;G01N21/59
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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