| 摘要 |
PURPOSE:To simplify the measurement for the external shape of a quartz oscillator with increased accuracy of measurement and then to increase the yield of production, by measuring the electrostatic capacitance of a quartz wafer with use of a metallic film formed in a pattern on both surfaces of the quartz wafer as an electrode. CONSTITUTION:The external patterns 6 of a quartz oscillator shown in the figure are all connected electrically to each other, and the transcribed pattern forms an electrode as a whole. Measuring terminals 7 and 7' connected to a capacitance measuring machine (not shown in a figure) are connected to the electrodes on both surfaces of a wafer 5 to measure electrostatic capacity. In such a way, the measurement of an external shape is simplified with increased accuracy for a quartz oscillator produced by applying photolithto graphy. Furthermore the yield of production is increased with reduced cost. |
