| 摘要 |
PURPOSE:To simplify exposure operation and reduce the cost of a device by a method wherein the bunch of optical fiber is arranged closely to the front of a Braun tube and an exposed substrate surface is irradiated through the bunch of fiber. CONSTITUTION:The stalks of a bunch of optical fiber 61 is fixed closely and perpendicularly to the front glass 60 of a Braun tube and the other end is arranged closely to the sensitive film 62 of an exposure substrate 63. An electron beam 57 is irradiated on the desired position of a fluorescent screen 58 and the ray from a bright point 59 travels in the front glass 60. An incident ray with more than a particular critical angle to the end of the fiber 61a is totally reflected and the sensitive film 62 is exposed 62b by a small number of fiber 61a directly under the bright point 59. That is, the exposure can be performed with little extending and approximately scores of mu of exposure pattern can be obtained using the array of cellfock lens with a diameter of scores of mu or less. As the exposure pattern can be stored in the computer, mask formation is not required, and required period for pattern generation is short, in addition, as there is no high precision moving part, the cost of device is low. |
