| 摘要 |
PURPOSE:To enable a sample position from which a reflecting diffraction pattern is obtained to be easily determined by previously making the optical axis of an unscanned electron ray, which can be switched by one touch operation, to coinside with the optical axis of a scanned electron ray. CONSTITUTION:The optical axis of an unscanned electron ray is adjusted with an exclusive shaft position setting circuit so that the above optical axis passes the center of a diffraction sample chamber 1. Next, an electron ray is scanned, and the optical axis of the scanned electron ray is arranged in alignment with the center of the chamber 1 by means of a shaft position setting circuit of the scanning mode. Then, a sample 4 is inserted so as to obtain a lowly multiplied image of the entire sample 4 upon the CRT of an absorbed-electron display device. After that, an attachment table 10 is rotated so as to adjust the sample 4 to be parallel to the electron ray. By the means mentioned above, a reflecting diffraction pattern can be easily obtained by carrying out an adjustment by means of fine adjustment knobs 6 and 11 so that the position, on which the reflecting diffraction pattern of the sample 4 is desired to be obtained, coincides with the center of the CRT before thus obtained pattern is returned back to the electron ray. |
