| 摘要 |
PURPOSE:To stably and positively select non-defective chips in accordance with a read signal by a method wherein the quality of chips is stored in a memory at wafer stage. CONSTITUTION:When the measuring 21 result of the chips 12 (3, 5, 9) of a wafer 11 is not good, a signal 1 is written into addresses 003, 005, 009, corresponding to respective positions. After dicing, the presence or absence of a chip is detected by a sensor by making the chip 12-0 as a starting point. In the case of the presence of the chip, an address signal corresponding to the position is read from a memory 22, and if the signal is 0, the chip is judged 23 as a good one. Even if the sensor detects the presence of the chip 12-3, the chip 12-3 is judged as a bad one by the signal 1 of the address 003 and left as it is. This composition performs stable and positive selection of chips and appreciably improves the efficiency of a manufacturing process. |
