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发明名称
摘要
申请公布号
JPS585843(B2)
申请公布日期
1983.02.02
申请号
JP19770094632
申请日期
1977.08.09
申请人
KOGYO GIJUTSUIN
发明人
KANEKO SETSUO
分类号
H01J37/317;C23C14/14;C23C14/32;H01J37/30;H01L21/203;H01L21/26;H01L21/268
主分类号
H01J37/317
代理机构
代理人
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地址
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