| 摘要 |
PURPOSE:To make highly accurate position detection possible by using a magneswitch as a sample's origin position detector in an external deliverly means for driving a table, situated within an electron beam exposure room, on which a sample is placed. CONSTITUTION:In an external deliverly means for driving a sample table within an electron beam exposure room, upper and lower tables 5, 6 are installed on a bearing stand 9, and a bracket 10 with a ball screw nut 4 fixed to it is situated above the tables. Rotating a ball screw jig 3 by a motor 11 through a coupling 12 can reciprocate the ball screw nut 4, the bracket 10, the upper table 5, a magnet 1, and a moving bar 7 as one united body, as indicated by the arrow A. When the magnet 1 passes by a detector head 2 a signal (giving an origin position) is issued. A magneswitch, which is a high precision non-contact position detector, detects magnetic flux of the magnet 1 in a vertical direction and outputs a DC voltage proportional to the flux. |
