发明名称 CASSETTE RETAINER FOR ELECTRON BEAM APPARATUS
摘要 PURPOSE:To prevent friction between a cassette and a sample table and to improve positioning accuracy by providing a roller which, during cassette insertion and extraction, projects vertically from the upper surface of the sample table and abuts against the under surface of the cassette. CONSTITUTION:During insertion and extraction of a cassette 12, the cassette 12 rotates a drive shaft 22, lifting up its leg body 23. This causes an oscillating arm 15 to move up and a roller 19c projects vertically from the upper surface of a sample table 11, making cassette insertion and extraction smooth. After the cassette 12 is inserted the drive shaft 22 returns to its original position, thereby returning the oscillating arm 15 and the roller 19c to their respective original positions, and at the same time the cassette 12 is pressed in place by a pressing board 18.
申请公布号 JPS5816529(A) 申请公布日期 1983.01.31
申请号 JP19810115559 申请日期 1981.07.23
申请人 TOKYO SHIBAURA DENKI KK;TOSHIBA KIKAI KK 发明人 HATA SHIYUNTAROU;SUGIHARA KAZUYOSHI;TOUJIYOU TOORU;SUZUKI YOSHIO;NUMAGA TAKUOKI;MUKOUYAMA HARUHISA
分类号 H01J37/20;G01R31/302;H01J37/305;H01J37/34;H01L21/027;H01L21/66;H01L21/677;H01L21/683 主分类号 H01J37/20
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