| 摘要 |
PURPOSE:To obtain a strong clue for checking a stress distribution of the inside of a sample, and a variation of physical and mechanical properties, by applying stress to the sample under abservation. CONSTITUTION:On a sample base 16 supported by noncontact, sample fitting bases 19 and 20 are provided, and both of them are arranged at opposed positions. Onto the upper surface of the sample fitting base 19 and the sample tension part 20, a sample is installed. In this state, when a motor 22 is rotated, the sample tension part moves in the direction where stress is applied to the sample 7, and it becomes possible to apply stress to the sample which is being observed. When the rotation of the motor 22 is set in the reverse direction, compressed stress can be applied to the sample. In the sample base constituted in this way, when the rotation of the motor 22 is executed at the flyback time of one scanning of X axis scanning or Y axis scanning, and the rotation of the motor is stopped when the sample is being observed, a movement of the sample is eliminated, and a clear image can be observed. |
