| 摘要 |
PURPOSE:To obtain a simultaneous evaporation film, a diffused-particle plasma polymerization film and a lamination film in a short time, by rotating substrates in a vessel having chambers partitioned by a partition plate. CONSTITUTION:Substrates are set on a holder 22, while air in a polymerizing vessel 21 is exhausted to a desired degree of vacuum. The holder 22 is rotated so that it traverses each chamber at a constant speed. A monomer gas is introduced from an inlet 215 into the vessel, a high frequency is applied to a coil 25, and thereby plasma polymerization is started. Then a material to be evaporated is put in the evaporation boat 26 and evaporated. While a thin film being formed, the thickness thereof is measured by means of measuring heads 213 and by the light reflection from a reflector 214, and thereby the thin film in the prescribed thickness is prepared. When operations are made independently, a evaporation film and a plasma film are formed, and when they are done simultaneously, a plasma polymerization film with diffused evaporation particles can be formed. When they are conducted simultaneously in two kinds of different boats, a simultaneous evaporation film can be made on the substrate. According to this constitution, various films can be formed simply and rapidly, and also the lamination thereof is enabled. |
